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Motion Stage

LM Guide Stage

Frame base Gantry Stage
  
Description
Improvement in reducing cost, weight and delivery time is achieved by the development of stages without granite base. It is suitable for repairing or inspection equipment requiring high speed operation

Features
- High stiff & low-resonance iron pipe frame designed by use of FEM analysis
- Improved controllability based on new control algorithm suppressing vibration
- High stiff & light weight composite material upper beam available (Optional)
Specification
Parameter
Unit
X₁, X₂
Y
Remark
Motor
-
JTKCA050
JTKCA0650
Iron-core type
Size
mm
3,720
3,000
Gen. 8
Storke
mm
2,700
2,400
Gen. 8
Load mass
kg
-
140
-
Position accuracy
㎛
2
2
after compensation
Repeatability
㎛
±1
±1
-
Straightness
㎛
20
30
-
Flatness
㎛
40
40
-
Yaw
arcsec
20
20
-
Pitch
arcsec
20
20
-
Verticalness
arcsec
-
±5
-
Speed
mm/sec
1,600
1,600
maximum
Acceleration
m/sec²
5
5
average
Speed ripple
%
±0.2/100
±0.2/100
at 100mm/sec
Stabilization tim
msec/lpos band(㎛)
650/±0.5
250/±0.5
200mm move at 400mm/sec
Jitter
㎛
±0.1
±0.1
-
List