- Coreless Linear motor operating on a circular track
- High resolution, high precision and stability of control enabled

- Resolution : 0.1㎛ / 0.5㎛/ 1㎛
- Stroke : 20mm ~ 120mm
- Jitter(in-position stability) below 50nm and quick response time
- Minimal backlash by use of a full closed-loop control of linear encoders
- Component for inspection systems of optical parts, optoelectronic parts, bio materials, printed circuit boards and mobile
phones

- Resolution : 0.1㎛ / 0.5㎛/ 1㎛
- Stroke : 10mm ~ 300mm
- Driven by either stepping motor or servo motor
- Precision positioning on the Z axis driven by a ball screw
- Minimal backlash and improved accuracy by use of a full closed-loop control of linear encoders (Optional)