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LM Guide Stage

Frame base Gantry Stage

Improvement in reducing cost, weight and delivery time is achieved by the development of stages without granite base. It is suitable for repairing or inspection equipment requiring high speed operation

Features
- High stiff & low-resonance iron pipe frame designed by use of FEM analysis
- Improved controllability based on new control algorithm suppressing vibration
- High stiff & light weight composite material upper beam available (Optional)

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LM Guide Stage

Acu-Positioner

Acu-positioner II series is cost effective system with high performance by applying single motor on the gantry stage structure


Features
- Low cost standard modular structure
- Compact, high stiff and light weight design

Detail View

LM Guide Stage

Cross Stage

Cross stage is a general purpose cost effective stage suitable for short stroke systems. Precision positioning can be enabled by simple control.

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LM Guide Stage

Gen. 8 High Acceleration Gantry Stage

- Stroke : 2,715mm2,630mm
- Acceleration : 4m/sec
- Velocity : 1.6m/sec
- Settling time : 250msec / 0.5
- Payload : 230kg

Detail View

LM Guide Stage

Gen. 5.5 Gantry Stage

- Stroke : 2,110mm1,650mm
- Accuracy : 2
- Repeatability : 1
- Applications : Glass lifting & illumination axis(Optional)

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LM Guide Stage

Gen. 8 Dual Gantry Stage

- Dimension : 3,800mm4,300mm
- Stroke : 2,510mm2,590mm
- Repeatability : 1

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LM Guide Stage

Multi-Mover Dual Gantry Stage

- Stroke : 2,100mm2,100mm
- In-position stability : 0.05
- Repeatability : 1

Detail View

LM Guide Stage

300mm Wafer Cross Stage

- Stroke : 350mm700mm
- Acceleraton : 10m/sec
- Velocity : 1.5m/sec
- Accuracy : 3
- Settling time : 250msec/0.5
- Payload : 20kg

Detail View

LM Guide Stage

Water Proof Linear Motor

- Stroke : 1,600mm
- Payload : 500kg
- Water splashing environment

Detail View

LM Guide Stage

High Acceleration Cross Stage

- Motor : 7,200N(X axis), 3,600N(Y axis) (core type)
- Stroke : 800mm800mm
- Accelertion : 10m/sec
- Velocity : 1.5m/sec
- Settling time : 80msec/2

Detail View

LM Guide Stage

Mini Multi Head Linear Motor

- Head span : 50mm
- Repeatability : 1
- Applications : glass scriber / dispenser

Detail View

LM Guide Stage

Gantry, Hybrid, Cross Types

- Sub-micron level high precision stages with multi heads & multi axis control
- Z axis available (optional)
- Standard and custom design available
- Expanded work area : 2,300mm x 5,000mm
- Applications : Production equipment for FPD, PCB, semiconductor & electronic components

Detail View