Ceramic is superior to granite in terms of straightness, stiffness and water absorption (zero), so that ceramic is more robust against deformation and deterioration. Ceramic air bearing stages are suitable for the equipment requiring high class accuracy.

Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.