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Motion Stage

LM Guide Stage

  
Description
- Stroke : 2,100mm×2,100mm
- ジッタ : ±0.05㎛
- 繰り返し精度 :±1㎛
Specification
Axis
X₁~ X₄
Y₁~ Y12
Storke
2,100mm
2,100mm
Guide
LM Bearing
Load mass
40kg(Head)
Speed
500mm/sec
Acceleration
1m/sec²
Position accuracy(After calibration)
10㎛
Repeatability
±1㎛
Option
Application field
LCD height measuring equipment etc..
List