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Motion Stage

LM Guide Stage

  
Description
- Stroke : 350mm×700mm
- Acceleraton : 10m/sec²
- 速度 : 15m/sec
- 位置精度 : 3㎛
- Settling Time : 250msec/±0.5㎛
- 負荷質量 :20kg
Specification
Axis
X
Y
Storke
700mm
350mm
Guide
LM Bearing
Load mass
20kg(Head)
Speed
1.5m/sec
Acceleration
10m/sec²
Position accuracy(After calibration)
3㎛
Repeatability
±1㎛
Option
Application field
Semiconductor repair equipment etc..
List