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Linear Motors

Customized Linear Motors

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Description
- 半導体、光学部品製造設備に応用
- 停止時安定性(50nm以下)、早い応答性
- リニアエンコーダ標準装着
- コンパクトデザイン
Specification
Model
JSAH20
JSAH40
JSAH60
JSAH80
JSAH100
JSAH120
Performance Parameters
Units
Normal Load Capacity
kg
5
5
5
5
5
5
Average Acceleration *Note1
m/sec²
2.5
2.5
2.5
2.5
2.5
2.5
Max Velocity *Note1
m/sec
0.2
0.3
0.35
0.4
0.5
0.55
Straightness
㎛
3
3
3
3
4
4
Flatness
㎛
6
6
8
8
10
10
Positional Accuracy *Note2
㎛
3
3
4
4
5
5
Bi-directional Repeatability *Note2
㎛
±1
±1
±1
±1
±1
±1
Total Weight
kg
1.8
2
2.2
2.4
2.6
2.8
Mover Weight
kg
0.7
0.8
1.0
1.1
1.3
1.4
    Measured at the mover center with no load (Temp. 20±2˚C).
    *Note1 : Encoder resolution : 1um     *Note2 : Encoder resolution : 0.1um
    ※ Acceleration, Velocity, Accuracy, Repeatability depend upon encoder resolution
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