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  • 300mm Wafer Cross Stage
모션 스테이지

LM가이드 스테이지

300mm Wafer Cross Stage
  
설명
- Stroke : 350mm×700mm
- Acceleraton : 10m/sec²
- Velocity : 1.5m/sec
- Accuracy : 3㎛
- Settling Time : 250msec/±0.5㎛
- Payload : 20kg
사양
Axis
X
Y
Storke
700mm
350mm
Guide
LM Bearing
Load mass
20kg(Head)
Speed
1.5m/sec
Acceleration
10m/sec²
Position accuracy(After calibration)
3㎛
Repeatability
±1㎛
Option
Application field
Semiconductor repair equipment etc..
List