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Motion Stage

LM Guide Stage

  
Description
- Stroke : 2,110mm×1,650mm
- 位置精度 : 2㎛
- 繰り返し精度 :±2㎛
- ジャバラカバー、石ベース : Glass lifting & illumination 軸
Specification
Axis
X₁, X₂
Y
Storke
1,900mm
1,600mm
Guide
LM Bearing
Load mass
30kg(Head)
Speed
500mm/sec
Acceleration
2m/sec²
Position accuracy(After calibration)
2㎛
Repeatability
±1㎛
Option
Glass lifting & illumination axis
Application field
LCD thickness and height measuring equipment
List