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Motion Stage

LM Guide Stage

  
Description
- サイズ : 3,800mm×4,300mm
- Stroke : 2,510mm×2,590mm
- 繰り返し精度 : ±1㎛
Specification
Axis
X₁~ X₃
Y₁~ Y₄
Storke
2,600mm
2,600mm
Guide
LM Bearing
Load mass
30kg(Head)
Speed
500mm/sec
Acceleration
1m/sec²
Position accuracy(After calibration)
8㎛
Repeatability
±1㎛
Option
Application field
LCD Auto Prober equipment etc..
List