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Motion Stage

Air Bearing Stage

  
Description
Specification
Axis
X₁, X₂
Y
Storke
800mm
920mm
Guide
Air bearing
Load mass
200kg/T Axis
Speed
0.5m/sec
Acceleration
1m/sec²
Position accuracy(After calibration)
2㎛
Repeatability
±1㎛
Straightness
6㎛
-
Speed ripple
0.1%, at 0.1m/sec
T-axis
Ball screw & R guide ±3degree
Application field
Laser processing, LCD pattern inspection
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