• Home
  • Product
  • Motion Stage
Motion Stage

Air Bearing Stage

  
Description
Specification
Axis
X(Scan)
Y(Step)
Storke
700mm
800mm
Guide
Ceramic air bearing
Air bearing
Load mass
100kg
-
Acceleration
2m/sec²
Position accuracy(After calibration)
±0.3㎛
±1.1㎛
Repeatability
±0.2㎛
±0.2㎛
Straightness
1.8㎛
2.4㎛
Application field
Photo mask inspection Machine etc..
List