• Home
  • Product
  • Motion Stage
Motion Stage

Air Bearing Stage

  
Description
Specification
Axis
X
Y
Storke
3,100mm
2,100mm
Guide
Air bearing
LM bearing
Load mass
400kg
50kg
Speed
400mm/sec
Acceleration
1m/sec²
Position accuracy(After calibration)
5㎛
Repeatability
±1㎛
Option
Application field
LCD vision inspection Machine etc..