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Motion Stage

Air Bearing Stage

  
Description
Specification
Axis
X₁, X₂
Y
Storke
2,100mm
400mm
Guide
Air bearing
LM bearing
Load mass
250kg
40kg
Speed
800mm/sec
Acceleration
2m/sec²
Position accuracy(After calibration)
4㎛
Repeatability
±1㎛
Option
Theta axis
Application field
LCD pattern inspection machine etc..
List