Multi-axis motion stages for super-high
precision positioning systems
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 Applications : PCB, FPD, semiconductor lines,
inspection & scanning systems
Product line up :
- Cross type/ hybrid type/ gantry type stages
- Air bearing stages, aligning stages |
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| Linear motors for high
precision & high acceleration
positioning systems
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Applications : industrial
equipment, factory automation
equipment
Product line up :
- Single axis linear motors
(coreless/ iron-core type)
- Ceramic air bearing linear
motors
- Water-proof linear motors
- Linear servo drivers |
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| Rotary DD motors for systems
requiring high torque and
high resolution
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Applications : Production
equipment for LED, FPD &
semiconductor, Printing & edgegrinding equipment
Main products :
- Diameter : 300mm, 240mm, 160mm, 152mm,
150mm, 110mm
- DD motors for roll feeders |
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