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 Linear Motors |
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Coreless Type (JTKL) :
- Low speed ripple due to minimal cogging
- Force range : 30N~4000N
- 4 series, 11 types available
- Suitable for precision production equipment for FPD and semiconductors |
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Iron-Core Type (JTKC) :
- Cost effective general purpose linear motors
- High force high speed control
- Force range : 30N~4000N
- 3 series, 6 types available
- Suitable for equipment for FPD production and FA |
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| Customized Linear Motors |
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Arc Motors :
- Coreless Linear motor operating on a circular track
- High resolution, high precision and stability of control enabled |
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Mini Stages :
- Jitter(in-position stability) below 50nm and quick response time
- Resolution : 0.1㎛ / 0.5㎛ / 1㎛
- Stroke : 20mm ~ 120mm
- Suitable for production equipment of semiconductor and optical components
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Vertical Precision Positioning Stages :
- Precision positioning on the Z axis driven by a ball screw
- Resolution : 0.1㎛ / 0.5㎛ / 1㎛
- Stroke : 10mm ~ 300mm
- Driven by either stepping motor or servo motor
- Minimal backlash and improved accuracy by use of a fullclosed-loop control of linear encoders
(Optional) |
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