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Motion Stage

Air Bearing Stage

Gen. 4 XYZ Ceramic Air Bearing Gantry Stage
  
Description
Ceramic is superior to granite in terms of straightness, stiffness and water absorption (zero), so that ceramic is more robust against deformation and deterioration. Ceramic air bearing stages are suitable for the equipment requiring high class accuracy.
Specification
Axis
X₁, X₂
Y
Storke
800mm
920mm
Guide
Granite air bearing
Ceramic air bearing
Load mass
30kg/Z Axis
Speed
500mm/sec
Acceleration
5m/sec²
Position accuracy(After calibration)
±0.3㎛
Repeatability
±0.1㎛
Stop Stability
±0.05㎛
Application field
Ultra precision length measuring Machine
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