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Motion Stage

Air Bearing Stage

XY Co-planar Air Bearing Stage
  
Description
Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.
Specification
Axis
Storke
520mm X 520mm X 6mm(Z) X 360deg(T)
Guide
Air bearing
Load mass
20kg
Acceleration
2m/sec²
Position accuracy(After calibration)
1㎛
Repeatability
±0.5㎛
Speed ripple
0.1%, at 100mm/sec
T-axis, Z-axis
DDmotor, wedge type
Application field
Solar cell, Wafer Machines etc..
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