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Motion Stage
Air Bearing Stage
XYZP 수직 Ceramic Air Bearing Stage
Description
Specification
Axis |
X(Scan) |
Y(Step) |
| Storke | 700mm |
800mm |
| Guide | Ceramic air bearing |
Air bearing |
| Load mass | 100kg |
- |
| Acceleration | 2m/sec² |
|
| Position accuracy(After calibration) | ±0.3㎛ |
±1.1㎛ |
| Repeatability | ±0.2㎛ |
±0.2㎛ |
| Straightness | 1.8㎛ |
2.4㎛ |
| Application field | Photo mask inspection Machine etc.. |
|
JUSTEK, Inc.
- 630-46 Nambudae-ro, Jinwi-myeon, Pyeongtaek-si, Gyeonggi-do, Korea (Zip codes : 17711)
- Tel. +82-31-647-5500
- Fax. +82-31-647-5555
- E-mail. info@justek.com
Japan branch : Morikawa Koudenki, Inc.
- Hellios Kannai Bldg., 3-21-2, Motohama-cho, Naka-ku, Yokohama-shi, Kanagawa-ken, 231-0004, Japan
- Tel. +81-45-222-0779
- Fax. +81-45-222-8283
- E-mail. sjkang@justek.com
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