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- Gen. 6 Planar Air Bearing Stage
Motion Stage
Air Bearing Stage
Gen. 6 Planar Air Bearing Stage
Description
Specification
Axis |
X₁, X₂ |
Y |
| Storke | 2,100mm |
400mm |
| Guide | Air bearing |
|
| Load mass | 250kg |
|
| Speed | 800m/sec |
|
| Acceleration | 2m/sec² |
|
| Position accuracy(After calibration) | 4㎛ |
|
| Repeatability | ±1㎛ |
|
| Option | Theta axis |
|
| Application field | LCD pattern inspection |
|
JUSTEK, Inc.
- 630-46 Nambudae-ro, Jinwi-myeon, Pyeongtaek-si, Gyeonggi-do, Korea (Zip codes : 17711)
- Tel. +82-31-647-5500
- Fax. +82-31-647-5555
- E-mail. info@justek.com
Japan branch : Morikawa Koudenki, Inc.
- Hellios Kannai Bldg., 3-21-2, Motohama-cho, Naka-ku, Yokohama-shi, Kanagawa-ken, 231-0004, Japan
- Tel. +81-45-222-0779
- Fax. +81-45-222-8283
- E-mail. sjkang@justek.com
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