Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.
 Specifications
Axis |
|
|
| Effective stroke |
520mm X 520mm X 6mm(Z) X 360deg(T) |
| Guide |
Air bearing
|
| Payload |
20kg |
| Acceleration |
2m/sec² |
| Accuracy (after compensation) |
1㎛ |
| Repeatability |
±0.5㎛ |
| Speed ripple |
0.1%, at 100mm/sec |
| T axis, Zaxis |
DD motor, wedge type |
| Applications |
Production equipment for solar cell & wafer |
|
