|
|
 |
 LM Guide Stage |
|
|
 |
| Gantry, Hybrid, Cross Types
|
- Sub-micron level high precision stages with multi heads & multi axis control
- Z axis available (optional) |
- Standard and custom design available
- Expanded work area : 2,300mm x 5,000mm |
| - Applications : Production equipment for FPD, PCB, semiconductor & electronic components |
|
|
|
| Air Bearing Stages |
|
|
 |
| Gantry, Hybrid, Cross Types |
- Nano class high precision stages
- High acceleration/ deceleration & Low speed ripple |
- Standard & custom design available
- Full flexibility in dimension from small to large
- Z axis available (Optional)
|
| - Applications : Production equipment for FPD, PCB, semiconductor & Electronic components |
|
|
|
|
|
|
|
