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Vertical Precision Positioning Stages
- Resolution : 0.1㎛ / 0.5㎛/ 1㎛
- Stroke : 10mm ~ 300mm
- Driven by either stepping motor or servo motor
- Precision positioning on the Z axis driven by a ball screw
- Minimal backlash and improved accuracy by use of a full closed-loop control of linear encoders (Optional)