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Mini Stages(JSAH)
- Resolution : 0.1㎛ / 0.5㎛/ 1㎛
- Stroke : 20mm ~ 120mm
- Jitter(in-position stability) below 50nm and quick response time
- Minimal backlash by use of a full closed-loop control of linear encoders
- Component for inspection systems of optical parts, optoelectronic parts, bio materials, printed circuit boards and mobile
   phones