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- 분해능 : 0.1㎛ / 0.5㎛ / 1㎛
- 이동거리 : 20mm ~ 120mm
- 반도체, 광학 부품 제조 설비에 응용
- 정지시 떨림(50nm이하), 빠른 응답성
- 리니어 엔코더를 Full closed-loop 제어하여 backlash 최소화
- 돌출부 없는 콤팩트 디자인으로 공간 효율 설계 |
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Model |
JSAH20 |
JSAH40 |
JSAH60 |
JSAH80 |
JSAH100 |
JSAH120 |
| Performance Parameters |
Units |
| Normal Load Capacity |
kg |
5 |
5 |
5 |
5 |
5 |
5 |
| Average Acceleration *Note1 |
m/sec² |
2.5 |
2.5 |
2.5 |
2.5 |
2.5 |
2.5 |
| Max Velocity *Note1 |
m/sec |
0.2 |
0.3 |
0.35 |
0.4 |
0.5 |
0.55 |
| Straightness |
㎛ |
3 |
3 |
3 |
3 |
4 |
4 |
| Flatness |
㎛ |
6 |
6 |
8 |
8 |
10 |
10 |
| Positional Accuracy *Note2 |
㎛ |
3 |
3 |
4 |
4 |
5 |
5 |
| Bi-directional Repeatability *Note2 |
㎛ |
±1 |
±1 |
±1 |
±1 |
±1 |
±1 |
| Total Weight |
kg |
1.8 |
2 |
2.2 |
2.4 |
2.6 |
2.8 |
| Mover Weight |
kg |
0.7 |
0.8 |
1.0 |
1.1 |
1.3 |
1.4 |
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Measured at the mover center with no load (Temp. 20±2˚C).
*Note1 : Encoder resolution : 1um *Note2 : Encoder resolution : 0.1um
※ Acceleration, Velocity, Accuracy, Repeatability depend upon encoder resolution |
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JSAH
