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  • XYZP 수직 Ceramic Air Bearing Stage
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XYZP 수직 Ceramic Air Bearing Stage
  
설명
사양
Axis
X(Scan)
Y(Step)
Storke
700mm
800mm
Guide
Ceramic air bearing
Air bearing
Load mass
100kg
-
Acceleration
2m/sec²
Position accuracy(After calibration)
±0.3㎛
±1.1㎛
Repeatability
±0.2㎛
±0.2㎛
Straightness
1.8㎛
2.4㎛
Application field
Photo mask inspection Machine etc..
List