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  • Gen. 7.5 Air Bearing Stage
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Gen. 7.5 Air Bearing Stage
  
설명
사양
Axis
X
Y
Storke
3,100mm
2,100mm
Guide
Air bearing
LM bearing
Load mass
400kg
50kg
Speed
400mm/sec
Acceleration
1m/sec²
Position accuracy(After calibration)
5㎛
Repeatability
±1㎛
Option
Application field
LCD vision inspection Machine etc..
List