• Home
  • Product
  • Product
  • 모션 스테이지
  • Gen. 4.5 Hybrid Air Bearing Stage
모션 스테이지

에어베어링 스테이지

Gen. 4.5 Hybrid Air Bearing Stage
  
설명
사양
Axis
X₁, X₂
Y
Storke
2,100mm
400mm
Guide
Air bearing
LM bearing
Load mass
250kg
40kg
Speed
800mm/sec
Acceleration
2m/sec²
Position accuracy(After calibration)
4㎛
Repeatability
±1㎛
Option
Theta axis
Application field
LCD pattern inspection machine etc..
List